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We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10-22

作者:Olga, Boytsova;Alexey, Klimenko;Vasiliy, Lebedev;Alexey, Lukashin;Andrey, Eliseev

来源:Beilstein journal of nanotechnology 2015 年 6卷

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作者:
Olga, Boytsova;Alexey, Klimenko;Vasiliy, Lebedev;Alexey, Lukashin;Andrey, Eliseev
来源:
Beilstein journal of nanotechnology 2015 年 6卷
标签:
anodic aluminium oxide atomic force microscopy (AFM) cantilever arrays humidity mechanical sensor porous alumina
We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10-22