We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10-22
作者:Olga, Boytsova;Alexey, Klimenko;Vasiliy, Lebedev;Alexey, Lukashin;Andrey, Eliseev
来源:Beilstein journal of nanotechnology 2015 年 6卷