In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5

作者：Bian, Tian；Yulong, Zhao；Zhuangde, Jiang；Ling, Zhang；Nansheng, Liao；Yuanhao, Liu；Chao, Meng

来源：Sensors (Basel, Switzerland) 2009 年 9卷 3期